Patent Assignment
Reel/Frame 036331/0570
Assignment of Assignor's Interest
Recorded: 2015-08-14
Pages: 12
Assignors
INADA, TETSUAKI
Executed: 2015-07-29
WADA, YUICHI
Executed: 2015-07-30
ISHISAKA, MITSUNORI
Executed: 2015-07-30
HIRANO, MITSUHIRO
Executed: 2015-07-29
HORII, SADAYOSHI
Executed: 2015-07-29
ITATANI, HIDEHARU
Executed: 2015-07-29
TAKANO, SATOSHI
Executed: 2015-07-30
TAKEBAYASHI, MOTONARI
Executed: 2015-07-30
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Method of Processing Substrate
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.