Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
There is provided a method of manufacturing a semiconductor device, including forming a film on a substrate by performing a cycle a predetermined number of times, the cycle including non-simultaneously performing supplying a precursor gas to the substrate; and supplying a first oxygen-containing gas to the substrate. Further, the act of supplying the precursor gas includes a time period in which the precursor gas and a second oxygen-containing gas are simultaneously supplied to the substrate.
1. A method of manufacturing a semiconductor device, comprising:
forming a film on a substrate by performing a cycle multiple times, the cycle including non-simultaneously performing:
supplying a precursor gas to the substrate; and
supplying a first oxygen-containing gas to the substrate,
wherein the act of supplying the precursor gas includes a time period in which the precursor gas and a second oxygen-containing gas are simultaneously supplied to the substrate without supplying a hydrogen-containing gas, and
wherein a supply amount of the second oxygen-containing gas per cycle is set to be smaller than a supply amount of the first oxygen-containing gas per cycle.
2. The method of claim 1 , wherein a supply flow rate of the second oxygen-containing gas per cycle is set to be smaller than a supply flow rate of the first oxygen-containing gas per cycle.
3. The method of claim 1 , wherein a ratio of a supply flow rate of the second oxygen-containing gas per cycle to a supply flow rate of the first oxygen-containing gas per cycle is set to be greater than or equal to 1/20, and smaller than or equal to 1/2.
4. The method of claim 1 , wherein a ratio of a supply flow rate of the second oxygen-containing gas per cycle to a supply flow rate of the first oxygen-containing gas per cycle is set to be greater than or equal to 1/10, and smaller than or equal to 1/5.
5. The method of claim 1 , wherein a supply time of the second oxygen-containing gas per cycle is set to be shorter than or equal to a supply time of the first oxygen-containing gas per cycle.
6. The method of claim 1 , wherein the act of supplying the first oxygen-containing gas includes a time period in which the first oxygen-containing gas and a hydrogen-containing gas are simultaneously supplied to the substrate.
7. The method of claim 1 , wherein the first oxygen-containing gas and the second oxygen-containing gas have the same molecular structure.
8. The method of claim 1 , wherein the first oxygen-containing gas and the second oxygen-containing gas have different molecular structures.
9. The method of claim 1 , wherein in the act of forming the film on the substrate, a temperature of the substrate is set to a temperature at which the precursor gas is pyrolized.
10. The method of claim 1 , wherein a temperature of the substrate is set to be higher than or equal to 700 degrees C., and lower than or equal to 1000 degrees C.
11. The method of claim 1 , wherein the precursor gas includes at least one selected from a group consisting of a silane compound, a siloxane compound, and a silazane compound.
12. The method of claim 1 , wherein the first oxygen-containing gas includes at least one selected from a group consisting of oxygen gas, nitrous oxide gas, nitric oxide gas, nitrogen dioxide gas, ozone gas, atomic oxygen, an oxygen radical, and a hydroxyl radical, and
wherein the second oxygen-containing gas includes at least one selected from a group consisting of oxygen gas, nitrous oxide gas, nitric oxide gas, nitrogen dioxide gas, and ozone gas.
13. The method of claim 1 , wherein a temperature of the substrate in the act of supplying the precursor gas is the same as a temperature of the substrate in the act of supplying the first oxygen-containing gas.
14. The method of claim 1 , wherein in the act of supplying the first oxygen-containing gas, the first oxygen-containing gas is supplied to the substrate without supplying the precursor gas.
15. The method of claim 1 , wherein the act of supplying the first oxygen-containing gas includes a time period in which the first oxygen-containing gas and a hydrogen-containing gas are simultaneously supplied to the substrate without supplying the precursor gas.