Method of manufacturing semiconductor device
In a method of manufacturing a semiconductor device, by performing a predetermined number of times a cycle of performing supplying reducing gas to a substrate having an insulating surface and a conductive surface and supplying metal-containing gas to the substrate in a time-division manner, a metal film is formed selectively on an insulating surface.
1. A method of manufacturing a semiconductor device, comprising:
(a) supplying reducing gas to an initial substrate having the insulating surface containing an element having an unshared electron pair and a conductive surface;
(b) performing a cycle a predetermined number of times to form a metal film selectively on an insulating surface, the cycle comprising;
(c) supplying the metal-containing gas to the substrate after (a); and
(d) supplying the reducing gas to the substrate,
wherein (c) and (d) are performed in a time-division manner.
2. The method according to claim 1 , wherein the reducing gas is an inorganic borane-based gas.
3. The method according to claim 1 , wherein the metal-containing gas is tungsten-containing gas, and the metal film is a tungsten film.
4. The method according to claim 1 , wherein a processing condition in the supplying reducing gas is selected in accordance with a selection ratio at time of forming the metal film selectively on the insulating surface.
5. The method according to claim 4 , wherein the processing condition is at least one out of a temperature at which the substrate is heated, pressure in a processing chamber housing the substrate, a supply flow rate of the reducing gas to the substrate, and supply time of the reducing gas to the substrate.
6. The method according to claim 5 , wherein the temperature at which the substrate is heated is a temperature in a range from 150 to 300° C.
7. The method according to claim 5 , wherein the pressure in a processing chamber housing the substrate is pressure in a range from 1 to 1000 Pa.
8. The method according to claim 5 , wherein the supply flow rate of the reducing gas is a flow rate in a range from 1 to 15000 sccm.
9. The method according to claim 5 , wherein the supply time of the reducing gas is time in a range from 1 to 60 seconds.
10. The method according to claim 1 , wherein the predetermined number of times for performing the cycle is selected to be less than incubation time required until growth of the metal film on the conductive surface is started.
11. The method according to claim 2 , wherein the inorganic borane-based gas is a diborane gas.
12. The method according to claim 2 , wherein the inorganic borane-based gas is a triborane gas.
13. The method according to claim 1 , wherein a time period of (b) is shorter than a time period of (c).
14. The method according to claim 1 further comprising:
(e) supplying an inert gas to the substrate during (b), wherein (e) is performed consecutively.