Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
There is provided a method of manufacturing a semiconductor device, comprising forming a film on a substrate in a process chamber by performing a cycle a predetermined number of times. The cycle includes alternately performing supplying a halogen-based first process gas to the substrate in the process chamber, and supplying a non-halogen-based second process gas to the substrate in the process chamber. Further, an internal pressure of the process chamber in the act of supplying the first process gas is set to be higher than an internal pressure of the process chamber in the act of supplying the second process gas.
1. A method of manufacturing a semiconductor device, comprising forming a film on a substrate in a process chamber by performing a cycle a predetermined number of times, the cycle including alternately performing:
supplying a halogen-based first process gas containing Si to the substrate in the process chamber; and
supplying a non-halogen-based second process gas containing Si to the substrate in the process chamber,
wherein an internal pressure of the process chamber in the act of supplying the first process gas is set to be higher than an internal pressure of the process chamber in the act of supplying the second process gas while a temperature of the substrate in the act of supplying the first process gas and a temperature of the substrate in the act of supplying the second process gas are set to be within a range of 350 to 450 degrees C.,
wherein the internal pressure of the process chamber in the act of supplying the first process gas is set to be 1,000 Pa or lower, and
wherein the film on the substrate is oxidized over an entire region in a film thickness direction without oxidation of a surface of the substrate.
2. The method of claim 1 , wherein the cycle further includes supplying a dopant gas to the substrate in the process chamber.
3. The method of claim 2 , wherein the cycle includes a time period in which the act of supplying the second process gas and the act of supplying the dopant gas are simultaneously performed.
4. The method of claim 2 , wherein the cycle further includes exhausting the second process gas from an interior of the process chamber, and
wherein the cycle includes a time period in which the act of exhausting the second process gas and the act of supplying the dopant gas are simultaneously performed.
5. The method of claim 2 , wherein the cycle includes a time period in which the act of supplying the first process gas and the act of supplying the dopant gas are simultaneously performed.
6. The method of claim 2 , wherein the cycle further includes exhausting the first process gas from an interior of the process chamber, and
wherein the cycle includes a time period in which the act of exhausting the first process gas and the act of supplying the dopant gas are simultaneously performed.
7. The method of claim 2 , wherein the cycle includes a time period in which the act of supplying the first process gas and the act of supplying the dopant gas are simultaneously performed, and a time period in which the act of supplying the second process gas and the act of supplying the dopant gas are simultaneously performed.
8. The method of claim 2 , wherein the cycle includes a time period in which the act of supplying the first process gas, the act of supplying the second process gas, and the act of supplying the dopant gas are non-simultaneously performed.
9. The method of claim 2 , wherein the cycle includes a time period in which the act of supplying the first process gas and the act of supplying the second process gas are alternately performed while the act of supplying the dopant gas is performed.