Assignment of Assignor's Interest

Recorded: 2015-09-09 Pages: 6

Assignors

YANAI, HIDEHIRO

Executed: 2015-08-19

YANAGISAWA, YOSHIHIKO

Executed: 2015-08-19

TSUBOTA, YASUTOSHI

Executed: 2015-08-19

Assignee

HITACHI KOKUSAI ELECTRIC INC.

14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN

Covered Property (1)

Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium

Application: 14/848,634 →

Publication: US 2016/0079101

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.