Patent Assignment
Reel/Frame 030124/0528
Assignment of Assignor's Interest
Recorded: 2013-04-01
Pages: 4
Assignors
YONEDA, AKIHIKO
Executed: 2013-03-18
KOTANI, HIROSHI
Executed: 2013-03-18
MIZUGUCHI, YASUHIRO
Executed: 2013-03-18
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Maintenance Method, and Maintenance Program
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.