Assignment of Assignor's Interest

Recorded: 2015-09-17 Pages: 3

Assignors

KONTANI, TADASHI

Executed: 2015-08-28

TATENO, HIDETO

Executed: 2015-08-28

UMEKAWA, ATSUSHI

Executed: 2015-08-28

Assignee

HITACHI KOKUSAI ELECTRIC INC.

14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN

Covered Property (1)

Substrate Processing Apparatus, Method for Manufacturing Semiconductor Device, and Recording Medium

Application: 14/856,312 →

Publication: US 2016/0002789

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.