Substrate processing apparatus and guide portion
A cleaning method includes (a) providing a process chamber after forming an oxide film on a substrate in the process chamber formed by a reaction tube and a manifold supporting the reaction tube by performing a cycle a predetermined number of times, the cycle including supplying a source gas to the substrate through a first nozzle in the manifold extending upward to an inside of the reaction tube, and supplying an oxidizing gas to the substrate through a second nozzle in the manifold extending upward to the inside of the reaction tube; and (b) cleaning an inside of the process chamber. The step (b) includes a first cleaning process of supplying a hydrogen fluoride gas into the reaction tube through the second nozzle; and a second cleaning process of supplying a hydrogen fluoride gas onto an inner wall surface of the manifold through a third nozzle disposed in the manifold.
1. A substrate processing apparatus comprising:
a reaction tube configured to accommodate a substrate therein;
a manifold supporting the reaction tube;
a process chamber defined by the reaction tube and the manifold;
a cover portion configured to close an opening at a lower end of the manifold and face an entirety of an inner wall surface of the manifold in a circumferential direction of the inner wall surface;
a guide portion disposed at the cover portion to face the inner wall surface of the manifold;
a source gas supply system configured to supply a source gas into the process chamber via a first nozzle;
a reaction gas supply system configured to supply a reaction gas into the process chamber via a second nozzle; and
a third nozzle disposed at the manifold to supply a cleaning gas into a gap between the manifold and the guide portion,
wherein the guide portion has a clearance between an entirety of an upper end of the guide portion and the inner wall surface of the manifold.
2. The substrate processing apparatus of claim 1 , wherein a gas supply hole of the third nozzle is lower than the upper end of the guide portion.
3. The substrate processing apparatus of claim 2 , wherein the guide portion is disposed concentrically with the inner wall surface of the manifold.
4. The substrate processing apparatus of claim 3 , wherein the guide portion comprises: a side surface portion facing the inner wall surface of the manifold; and an extending portion extending horizontally from the side surface portion toward the inner wall surface of the manifold.
5. The substrate processing apparatus of claim 4 , wherein the extending portion comprises a slit.
6. The substrate processing apparatus of claim 5 , wherein the extending portion extends from an upper end or a lower end of the side surface portion.
7. The substrate processing apparatus of claim 6 , wherein the guide portion comprises a heat-resistant material including at least one of quartz and SiC.
8. The substrate processing apparatus of claim 7 , wherein the reaction gas comprises an oxidizing gas.
9. The substrate processing apparatus of claim 8 , wherein the cleaning gas comprises a hydrogen fluoride gas.
10. A guide portion of a substrate processing apparatus comprising: a reaction tube configured to accommodate a substrate therein; a manifold supporting the reaction tube; a process chamber defined by the reaction tube and the manifold; a source gas supply system configured to supply a source gas into the process chamber via a first nozzle; a reaction gas supply system configured to supply a reaction gas into the process chamber via a second nozzle; a cleaning gas supply system configured to supply a cleaning gas to the manifold via a third nozzle disposed at the manifold; and a cover portion configured to close an opening at a lower end of the manifold and face an entirety of an inner wall surface of the manifold in a circumferential direction of the inner wall surface, the guide portion, disposed at the cover portion, comprising:
a side surface portion facing the inner wall surface of the manifold to define a space with the manifold where the cleaning gas is supplied; and
an extending portion extending from the side surface portion toward the inner wall surface of the manifold,
wherein the guide portion has a clearance between an entirety of an upper end of the guide portion and the inner wall surface of the manifold.
11. The substrate processing apparatus of claim 1 , wherein the clearance is configured t allow the cleaning gas supplied into the gap to escape from the gap to the process chamber therethrough.