Patent Assignment
Reel/Frame 034900/0448
Assignment of Assignor's Interest
Recorded: 2015-02-05
Pages: 8
Assignors
KOSUGI, TETSUYA
Executed: 2015-02-04
TAKEWAKI, MOTOYA
Executed: 2015-02-04
UENO, MASAAKI
Executed: 2015-02-04
MURATA, HITOSHI
Executed: 2015-02-04
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Heating Apparatus, Ceiling Heat Insulator, and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.