Substrate processing apparatus
A technique for improving stability and safety at the time of boat transfer is provided. A reaction tube configured to process a substrate, a seal cap, provided on an upper surface thereof with a substrate retainer for retaining the substrate, configured to close a furnace opening of the reaction tube, one of a first elevator and a second elevator configured to elevate the seal cap; and another of a first elevator and a second elevator configured to assist the one of the first elevator and the second elevator in elevating the seal cap.
1. A substrate processing apparatus comprising:
a reaction tube configured to process a substrate;
a seal cap, provided on an upper surface thereof with a substrate retainer for retaining the substrate, configured to close a furnace opening of the reaction tube;
a first elevator and a second elevator configured to elevate the seal cap; and
a controller configured to control the first elevator and the second elevator,
wherein one of the first elevator and the second elevator is configured to assist the other one of the first elevator and the second elevator in elevating the seal cap, and
wherein the first elevator includes;
a first arm configured to connect with and disconnect from the seal cap and retain the seal cap when connected with the seal cap; and
a first driving unit including a first elevator shaft and a first motor and configured to elevate the first arm along the first elevator shaft,
wherein the second elevator includes:
a second arm, fixed to the seal cap, configured to retain the seal cap; and
a second driving unit including a second elevator shaft and a second motor and configured to elevate the second arm along the second elevator shaft,
wherein the seal cap includes a first recessed portion, disposed at a side surface of the seal cap opposed to the first arm, configured to receive and engage the first arm,
wherein the controller is configured to control the first driving unit and the second driving unit to cause the first arm not to contact an inner wall surface of the first recessed portion when the seal cap is being elevated,
wherein the controller is configured to control the first driving unit and the second driving unit to cause the first arm to follow the second arm when the seal cap is elevated,
wherein the controller is configured to control the first arm to be moved between an accommodating position for receiving and engaging the first arm at the first recessed portion and an evacuating position for disconnecting and evacuating the first arm from the first recessed portion,
wherein the control unit is configured to control the first driving unit and the second driving unit so that the first arm is moved to the accommodating position in a state of stopping elevation of the seal cap,
wherein the controller is configured to control the first driving unit and the second driving unit so that, after the seal cap contacts the furnace opening, the first arm assists the second arm in pressing the seal cap in an upward direction.
2. The substrate processing apparatus according to claim 1 , wherein the first recessed portion is formed in a polygonal shape.
3. The substrate processing apparatus according to claim 1 , wherein the first elevator and the second elevator are installed in positions opposed to each other with the seal cap interposed therebetween.