Method of manufacturing semiconductor device
Described herein is a technique capable of providing a semiconductor device having good characteristics. According to the technique described herein, there is provided a method of manufacturing a semiconductor device, including: (a) loading a substrate into a process chamber; and (b) forming a stacked etch stopper film by performing: (b-1) forming a first etch stopper film containing a first element and a second element by supplying a first element-containing gas and a second element-containing gas onto the substrate; and (b-2) forming a second etch stopper film containing the first element, the second element and a third element by supplying the first element-containing gas, the second element-containing gas and a third element-containing gas onto the first etch stopper film.
1. A method of manufacturing a semiconductor device, comprising:
(a) loading a substrate into a process chamber; and
(b) forming a stacked etch stopper film comprising a first etch stopper film free of a third element and a second etch stopper film formed on the first etch stopper film and containing the third element by performing: (b-1) forming the first etch stopper film containing a first element and a second element by supplying a first element-containing gas and a second element-containing gas onto the substrate; and (b-2) the forming the second etch stopper film containing the first element, the second element and the third element by supplying the first element-containing gas, the second element-containing gas and a third element-containing gas onto the first etch stopper film.
2. The method of claim 1 , wherein first grooves are formed on a surface of the substrate, and the first etch stopper film is formed on the surface of the substrate and surfaces of the first grooves.
3. The method of claim 2 , further comprising:
(c) forming the first grooves before performing (b-1).
4. The method of claim 1 , wherein a thickness of the first etch stopper film is smaller than a thickness of the second etch stopper film in (b).
5. The method of claim 2 , wherein a thickness of the first etch stopper film is smaller than a thickness of the second etch stopper film in (b).
6. The method of claim 3 , wherein a thickness of the first etch stopper film is smaller than a thickness of the second etch stopper film in (b).
7. The method of claim 1 , further comprising:
(d) forming a wiring film after performing (b-2).
8. The method of claim 2 , further comprising:
(d) forming a wiring film after performing (b-2).
9. The method of claim 3 , further comprising:
(d) forming a wiring film after performing (b-2).
10. The method of claim 4 , further comprising:
(d) forming a wiring film after performing (b-2).
11. The method of claim 5 , further comprising:
(d) forming a wiring film after performing (b-2).
12. The method of claim 6 , further comprising:
(d) forming a wiring film after performing (b-2).
13. The method of claim 7 , wherein the wiring film is formed between insulating films in (d) after the insulating films are formed on the first grooves, the method further comprising: (e) exposing the second etch stopper film by etching the insulating films after performing (d).
14. The method of claim 8 , wherein the wiring film is formed between insulating films in (d) after the insulating films are formed on the first grooves, the method further comprising: (e) exposing the second etch stopper film by etching the insulating films after performing (d).
15. The method of claim 12 , wherein the wiring film is formed between insulating films in (d) after the insulating films are formed on the first grooves, the method further comprising: (e) exposing the second etch stopper film by etching the insulating films after performing (d).
16. The method of claim 13 , wherein the first etch stopper film is exposed in (e).
17. The method of claim 15 , wherein the first etch stopper film is exposed in (e).
18. The method of claim 7 , wherein insulating films are formed on first grooves and the wiring film is formed between the insulating films in (d), the method further comprising:
(f) forming second grooves by etching the insulating films, the stacked etch stopper film and a surface layer of the substrate after performing (d) such that bottom portions of the second grooves are located higher than bottom portions of the first grooves.
19. The method of claim 14 , further comprising: (f) forming second grooves by etching the insulating films, the stacked etch stopper film and a surface layer of the substrate after performing (d) such that bottom portions of the second grooves are located higher than bottom portions of the first grooves.
20. The method of claim 17 , further comprising: (f) forming second grooves by etching the insulating films, the stacked etch stopper film and a surface layer of the substrate after performing (d) such that bottom portions of the second grooves are located higher than bottom portions of the first grooves.