Patent Assignment
Reel/Frame 036253/0254
Assignment of Assignor's Interest
Recorded: 2015-08-05
Pages: 7
Assignors
MORITA, OSAMU
Executed: 2015-08-03
MORI, SHINICHIRO
Executed: 2015-08-03
KAMEDA, KENJI
Executed: 2015-08-03
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Cleaning Method, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, Recording Medium, and Cleaning Completion Determining Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.