Method for manufacturing semiconductor device, non-transitory computer-readable recording medium, and substrate processing apparatus
By sequentially performing, a plurality of times, a step of supplying a mixed gas of an organic metal-containing source gas and an inert gas to a process chamber housing a substrate by adjusting a flow velocity of the mixed gas on the substrate to 7.8 m/s to 15.6 m/s and adjusting a partial pressure of the organic metal-containing source gas in the mixed gas to 0.167 to 0.3, a step of exhausting the process chamber, a step of supplying an oxygen-containing gas to the process chamber, and a step of exhausting the process chamber, a metal oxide film is formed on the substrate.
1. A method for manufacturing a semiconductor device to form a metal oxide film on a substrate, comprising:
sequentially performing, a cycle a plurality of times, wherein the cycle includes:
(a) supplying a mixed gas of an organic metal-containing source gas and an inert gas to a process chamber housing the substrate by adjusting a flow velocity of the mixed gas on the substrate to 7.8 m/s to 15.6 m/s and adjusting a partial pressure of the organic metal-containing source gas in the mixed gas to 0.167 to 0.3;
(b) exhausting the process chamber,
(c) supplying a chlorine-containing gas to the process chamber,
(d) supplying an oxygen-containing gas to the process chamber, and
(e) exhausting the process chamber.
2. The method for manufacturing the semiconductor device according to claim 1 , wherein the organic metal-containing source gas is supplied in a plurality of steps in the (a) of at least one cycle among the plurality of times the cycle is performed.
3. The method for manufacturing the semiconductor device according to claim 2 , wherein the organic metal-containing source gas is supplied dividedly at least from a second cycle among the plurality of times the cycle is performed.
4. The method for manufacturing the semiconductor device according to claim 1 , wherein the organic metal-containing source gas is an organic zirconium-containing source gas or an organic hafnium-containing source gas.
5. The method for manufacturing the semiconductor device according to claim 4 , wherein the organic metal-containing source gas, the inert gas, and the oxygen-containing gas are supplied so as to flow in a direction horizontal to a surface of the substrate.