Patent Assignment
Reel/Frame 045323/0775
Assignment of Assignor's Interest
Recorded: 2018-03-23
Pages: 6
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME,, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Method for Manufacturing Semiconductor Device, Non-Transitory Computer-Readable Recording Medium, and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.