Patent Assignment
Reel/Frame 034583/0708
Assignment of Assignor's Interest
Recorded: 2014-12-24
Pages: 8
Assignors
NISHIURA, SUSUMU
Executed: 2014-12-09
INOSHIMA, KAORI
Executed: 2014-12-10
MITSUI, HIROYUKI
Executed: 2014-12-10
EKKO, HIROSHI
Executed: 2014-12-09
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Controlling Substrate Processing Apparatus, Method of Maintaining Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.