Patent Assignment
Reel/Frame 030096/0169
Assignment of Assignor's Interest
Recorded: 2013-03-27
Pages: 4
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Evaporation System
Application:
13/850,735 →
Publication:
US 2013/0267100
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.