Patent Assignment
Reel/Frame 036447/0214
Assignment of Assignor's Interest
Recorded: 2015-08-28
Pages: 7
Assignors
YANAI, HIDEHIRO
Executed: 2015-08-04
HIYAMA, SHIN
Executed: 2015-08-04
SHIMADA, TOSHIYA
Executed: 2015-08-04
ABURATANI, YUKINORI
Executed: 2015-08-04
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.