Patent Assignment
Reel/Frame 035973/0059
Assignment of Assignor's Interest
Recorded: 2015-07-02
Pages: 10
Assignors
SUGISHITA, MASASHI
Executed: 2015-06-03
URANO, YUUJI
Executed: 2015-06-04
MAEDA, KIYOHIKO
Executed: 2015-06-04
UENO, MASAAKI
Executed: 2015-06-03
KOSUGI, TETSUYA
Executed: 2015-06-03
NISHIDA, MASAYA
Executed: 2015-06-08
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method, Semiconductor Device Manufacturing Method, and Control Program
Application:
14/650,074 →
Publication:
US 2015/0370245
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.