Patent Assignment
Reel/Frame 028178/0698
Assignment of Assignor's Interest
Recorded: 2012-05-09
Pages: 4
Assignors
OTA, YOSUKE
Executed: 2012-03-15
HIROSE, YOSHIRO
Executed: 2012-03-15
SANO, ATSUSHI
Executed: 2012-03-15
KASAHARA, OSAMU
Executed: 2012-03-15
OKUDA, KAZUYUKI
Executed: 2012-03-15
MAEDA, KIYOHIKO
Executed: 2012-03-15
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device and Method of Processing Substrate and Substrate Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.