Patent Assignment
Reel/Frame 028190/0649
Assignment of Assignor's Interest
Recorded: 2012-05-10
Pages: 3
Assignor
SAKATA, MASAKAZU
Executed: 2012-03-01
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Supporting Table, Substrate Processing Apparatus, and Manufacture Method for Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.