Patent Assignment
Reel/Frame 028208/0680
Assignment of Assignor's Interest
Recorded: 2012-05-15
Pages: 8
Assignors
LEE, YUNG-YAO
Executed: 2012-05-02
WANG, YING YING
Executed: 2012-05-02
LIU, HENG-HSIN
Executed: 2012-05-02
LEE, HENG-JEN
Executed: 2012-05-02
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Tool Induced Shift Reduction Determination for Overlay Metrology