Patent Assignment
Reel/Frame 028209/0564
Assignment of Assignor's Interest
Recorded: 2012-05-15
Pages: 3
Assignor
ZIMMERMAN, RICHARD CARL
Executed: 2012-04-18
Assignee
ASML HOLDING N.V.
DE RUN 6501, VELDHOVEN, NL - 5504 DR, NETHERLANDS
Covered Property
(1)
Double EUV Illumination Uniformity Correction System and Method