Patent Assignment
Reel/Frame 028209/0767
Assignment of Assignor's Interest
Recorded: 2012-05-15
Pages: 10
Assignors
MOYAMA, KAZUKI
Executed: 2012-04-26
ISHIBASHI, KIYOTAKA
Executed: 2012-04-30
MORITA, OSAMU
Executed: 2012-05-08
TANIKAWA, TAKEHIRO
Executed: 2012-04-26
MATSUMOTO, NAOKI
Executed: 2012-05-08
MIHARA, NAOKI
Executed: 2012-04-30
YOSHIKAWA, WATARU
Executed: 2012-05-05
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus