Patent Assignment
Reel/Frame 028217/0623
Assignment of Assignor's Interest
Recorded: 2012-05-16
Pages: 2
Assignors
TOMIMATSU, SATOSHI
Executed: 2012-03-19
ONISHI, TSUYOSHI
Executed: 2012-03-21
AGEMURA, TOSHIHIDE
Executed: 2012-03-21
NANRI, TERUTAKA
Executed: 2012-03-19
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, JAPAN
Covered Property
(1)
Charged Particle Beam Apparatus and Film Thickness Measurement Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.