Patent Assignment
Reel/Frame 028224/0452
Assignment of Assignor's Interest
Recorded: 2012-05-17
Pages: 2
Assignors
HAMANO, KATSUYOSHI
Executed: 2012-03-08
TSUBOTA, YASUTOSHI
Executed: 2012-03-08
TOMITA, MASAYUKI
Executed: 2012-03-08
YOSHINO, TERUO
Executed: 2012-03-08
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and a Method of Manufacturing a Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.