Patent Assignment
Reel/Frame 028231/0821
Assignment of Assignor's Interest
Recorded: 2012-05-18
Pages: 2
Assignors
SEKIGUCHI, KENJI
Executed: 2012-04-11
FUJII, YASUSHI
Executed: 2012-04-11
SAKAZAKI, TETSUYA
Executed: 2012-04-11
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Liquid Processing Method, Liquid Processing Apparatus and Storage Medium