Patent Assignment
Reel/Frame 028233/0159
Assignment of Assignor's Interest
Recorded: 2012-05-18
Pages: 4
Assignor
YAMAZAWA, YOHEI
Executed: 2012-03-04
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method