Patent Assignment
Reel/Frame 028239/0086
Assignment of Assignor's Interest
Recorded: 2012-05-21
Pages: 3
Assignor
TOKYO HY-POWER LABS, INC.
Executed: 2012-05-10
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Plasma processing unit and high-frequency electric power supplying unit
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Feb 11, 2004
From: HAYAMI, TOSHIHIRO; IWASAKI, MASAHIDE; TAKAHIRA, JUNICHI; WATANABE, KAZUYOSHI
To: TOKYO ELECTRON LIMITED; TOKYO HY-POWER LABS., INC.; SHINDENGEN ELECTRIC MANUFACTURING CO., LTD.
Reel/Frame 014988/0762 →
Assignment of Assignor's Interest
Jun 10, 2011
From: SHINDENGEN ELECTRIC MANUFACTURING CO., LTD.
To: TOKYO ELECTRON LIMITED; TOKYO HY-POWER LABS, INC.
Reel/Frame 026424/0031 →