Patent Assignment
Reel/Frame 028253/0015
Assignment of Assignor's Interest
Recorded: 2012-05-23
Pages: 6
Assignors
LEE, CHIH-TSUNG
Executed: 2012-04-03
CHANG, HUNG-JUI
Executed: 2012-04-03
CHOU, YOU-HUA
Executed: 2012-04-03
JANGJIAN, SHUI-KO
Executed: 2012-04-03
KAO, CHUNG-EN
Executed: 2012-04-03
TSAI, MING-CHIN
Executed: 2012-04-03
LAI, HUAN-WEN
Executed: 2012-04-03
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Shower Head Apparatus and Method for Controllign Plasma or Gas Distribution