Patent Assignment
Reel/Frame 028264/0337
Assignment of Assignor's Interest
Recorded: 2012-05-24
Pages: 3
Assignors
SHINOZAKI, HIROYUKI
Executed: 2012-05-14
SHIMANO, TAKAHIRO
Executed: 2012-05-14
IMAMURA, AKIRA
Executed: 2012-05-14
NAKAMURA, AKIRA
Executed: 2012-05-14
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, JAPAN
Covered Property
(1)
Method and Apparatus for Monitoring a Polishing Surface of a Polishing Pad Used in Polishing Apparatus