Patent Assignment
Reel/Frame 028264/0952
Assignment of Assignor's Interest
Recorded: 2012-05-24
Pages: 3
Assignors
YOSHII, KOJI
Executed: 2012-03-23
YAMAGUCHI, TATSUYA
Executed: 2012-03-21
WANG, WENLING
Executed: 2012-03-27
SAITO, TAKANORI
Executed: 2012-05-17
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Heat Treatment Apparatus and Heat Treatment Method