Patent Assignment
Reel/Frame 028285/0761
Assignment of Assignor's Interest
Recorded: 2012-05-30
Pages: 3
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Patterning Process and Resist Composition