Patent Assignment
Reel/Frame 028294/0132
Assignment of Assignor's Interest
Recorded: 2012-05-31
Pages: 2
Assignor
MIZUBATA, MINORU
Executed: 2012-05-16
Assignee
DAINIPPON SCREEN MFG. CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Holding Apparatus, and Method of Holding Substrate
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.