Patent Assignment
Reel/Frame 028325/0576
Assignment of Assignor's Interest
Recorded: 2012-06-06
Pages: 2
Assignor
HAUF, MARKUS
Executed: 2010-04-14
Assignee
CARL ZEISS SMT AG
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Device for Controlling Temperature of an Optical Element
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.