Patent Assignment
Reel/Frame 028335/0708
Assignment of Assignor's Interest
Recorded: 2012-06-07
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Substrate Liquid Processing Apparatus, Liquid Processing Method, and Storage Medium