Patent Assignment
Reel/Frame 028336/0817
Assignment of Assignor's Interest
Recorded: 2012-06-07
Pages: 4
Assignors
SHUE, HONG-SENG
Executed: 2012-05-07
YANG, TAI-I
Executed: 2012-05-07
WU, WEI-DING
Executed: 2012-05-10
CHUNG, MING-TAI
Executed: 2012-05-07
YU, SHAO-CHI
Executed: 2012-05-07
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77 R.O.C., TAIWAN
Covered Property
(1)
Semiconductor Isolation Structure with Air Gaps in Deep Trenches