Patent Assignment
Reel/Frame 028353/0694
Assignment of Assignor's Interest
Recorded: 2012-06-11
Pages: 8
Assignors
CHEN, YEN-LIANG
Executed: 2012-03-26
HUANG, TE-CHIH
Executed: 2012-04-12
WANG, CHEN-MING
Executed: 2012-03-26
KE, CHIH-MING
Executed: 2012-03-26
GAU, TSAI-SHENG
Executed: 2012-03-26
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
System and Method for Alignment in Semiconductor Device Fabrication