Patent Assignment
Reel/Frame 028355/0914
Merger
Recorded: 2012-06-11
Pages: 5
Assignor
EDIAG SOLUTIONS
Executed: 2011-06-30
Assignee
CYMER KOREA INC.
EOYEON-HANSAN INDUSTRIAL PARK, 833-1 HANSAN-RI, CHEONGBOOK-MYEON, PYUNGTAEK, KYUNGKI-DO, 451-833, KOREA, REPUBLIC OF
Covered Properties
(2)
System for Accumulating Exposure Energy Information of Wafer and Management Method of Mask for Exposure Utilizing Exposure Energy Information of Wafer Accumulated with the System
System for Calculating Transmission Utility Factor Value of Photo Energy for Exposure and Method for Calculating Transmission Utility Factor Value of Photo Energy Utilizing the Calculation System
Related Assignments
(2)
Other recorded transfers of the patents in this record — the chain of ownership.