Patent Assignment
Reel/Frame 028361/0331
Assignment of Assignor's Interest
Recorded: 2012-06-12
Pages: 3
Assignor
SHIRAKAWA, MAKOTO
Executed: 2012-04-09
Assignee
HITACHI KOKUSAI ELECRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 1018980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Program for Controlling the Same, and Method for Fabricating Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.