Patent Assignment
Reel/Frame 028362/0549
Assignment of Assignor's Interest
Recorded: 2012-06-12
Pages: 2
Assignor
VARADARAJAN, BHADRI
Executed: 2012-06-12
Assignee
NOVELLUS SYSTEMS, INC.
4000 NORTH FIRST STREET, SAN JOSE, CALIFORNIA, 95134
Covered Property
(1)
REMOTE PLASMA BASED DEPOSITION OF SiOC CLASS OF FILMS