Patent Assignment
Reel/Frame 028364/0219
Assignment of Assignor's Interest
Recorded: 2012-06-13
Pages: 4
Assignors
CHONG, LAI WAN
Executed: 2012-04-03
HSIAO, WEN CHU
Executed: 2012-04-03
CHOU, YING MIN
Executed: 2012-04-03
KO, HSIANG HSIANG
Executed: 2012-04-03
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Surface Tension Modification Using Silane with Hydrophobic Functional Group for Thin Film Deposition