Patent Assignment
Reel/Frame 028388/0988
Assignment of Assignor's Interest
Recorded: 2012-06-16
Pages: 2
Assignors
LIN, YI-HUNG
Executed: 2012-03-28
LI, JR-HUNG
Executed: 2012-03-28
LI, CHII-HORNG
Executed: 2012-03-28
LEE, TZE-LIANG
Executed: 2012-03-28
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77 R.O.C., TAIWAN
Covered Property
(1)
Honeycomb Heaters for Integrated Circuit Manufacturing