Patent Assignment
Reel/Frame 028412/0528
Assignment of Assignor's Interest
Recorded: 2012-06-20
Pages: 2
Assignee
CANON ANELVA CORPORATION
5-1 KURIGI 2-CHOME, ASAO-KU, KAWASAKI-SHI, JAPAN
Covered Property
(1)
Temperature Control Method for Substrate Heat Treatment Apparatus, Semiconductor Device Manufacturing Method, Temperature Control Program for Substrate Heat Treatment Apparatus, and Recording Medium