Patent Assignment
Reel/Frame 028421/0100
Assignment of Assignor's Interest
Recorded: 2012-06-21
Pages: 8
Assignors
BEZEL, ILYA
Executed: 2012-06-20
SHCHEMELININ, ANATOLY
Executed: 2012-06-20
ZHAO, YANMING
Executed: 2012-06-20
DERSTINE, MATTHEW
Executed: 2012-06-21
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Adaptive Optics for Compensating Aberrations in Light-Sustained Plasma Cells