Patent Assignment
Reel/Frame 028426/0746
Assignment of Assignor's Interest
Recorded: 2012-06-22
Pages: 3
Assignors
SUZUKI, KEISUKE
Executed: 2012-06-12
KADONAGA, KENTARO
Executed: 2012-06-12
MORI, YOSHITAKA
Executed: 2012-06-12
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Forming Method and Film Forming Apparatus