Patent Assignment
Reel/Frame 028430/0776
Assignment of Assignor's Interest
Recorded: 2012-06-22
Pages: 2
Assignor
CLARK, ROBERT D
Executed: 2012-06-22
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-6 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Depositing Dielectric Films