Patent Assignment
Reel/Frame 028433/0096
Assignment of Assignor's Interest
Recorded: 2012-06-25
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Robot Positioning System for Semiconductor Tools