Patent Assignment
Reel/Frame 028474/0522
Assignment of Assignor's Interest
Recorded: 2012-07-01
Pages: 2
Assignee
TEL EPION INC.
37 MANNING ROAD, BILLERICA, MASSACHUSETTS, 01821
Covered Property
(1)
Gas Cluster Ion Beam Process for Opening Conformal Layer in a High Aspect Ratio Contact Via
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.