Patent Assignment
Reel/Frame 028493/0831
Assignment of Assignor's Interest
Recorded: 2012-07-05
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN ROAD 6, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Materials and Methods for Improved Photoresist Performance