Patent Assignment
Reel/Frame 028494/0063
Assignment of Assignor's Interest
Recorded: 2012-07-05
Pages: 2
Assignor
HATAKEYAMA, JUN
Executed: 2012-05-29
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Resist Composition and Patterning Process